Test of film thickness based on annular sub-aperture stitching interference

Test of film thickness based on annular sub-aperture stitchinginterferenceYang Li-hong*a,b, Su Jun-honga, Chen Zhi-liaaSchool of Optoelectronic Engineering, Xi´an Technological University, Xi’an 710032, P.R.China;bThe Faculty of Automation & Information Engineering, Xi´an University of Technology, Xi’an,710048, P.R.China