Texture etched ZnO_Al coated glass substrates for silicon based thin film solar cells

ZnO:Al ®lms were r.f.- and d.c.-magnetron sputtered on glass substrates from ceramic (ZnO:Al2O3) and metallic (Zn:Al) targets,respectively. The initially smooth ®lms exhibit high transparencies (T $ 83% for visible light including all re¯ection losses) and excellentelectrical properties (r ˆ 2:7±6 £ 1024 V cm). Dependi..