The low temperature synthesis of Al doped ZnO films on glass and polymer using pulsed co-magnetron sputtering- H2 effect

It has been reported that a small amount of hydrogen in argon plasma induces an increase in the crystallite size of the as-deposited films. Inaddition, control of the hydrogen partial pressure is expected to improve the carrier mobility by increasing the crystallinity of the film (largercrystal size and lower grain boundary effects). Al doped ZnO (AZO) films were..