Lafford et al phys stat sol c 0 - GaN tilt and twist fn thickness

X-Ray Metrology in Semiconductor Manufacturing, High Resolution X-ray diffraction, HRXRD, X-ray reflectivity, XRR, X-ray diffraction Imaging, XRDI, X-ray topography, XRT, SiGe, SiC, GaN, GaAs, InP, Sapphire, crystal, defects